Late gate cut using selective conductor deposition

ABSTRACT

Methods of forming a structure that includes a field-effect transistor and structures that include a field effect-transistor. A cut is formed that extends through a gate structure of the field-effect transistor such that a gate electrode of the gate structure is divided into a first section having a first surface and a second section having a second surface spaced across the cut from the first surface. After forming the cut, a first section of a conductive layer is selectively deposited on the first surface of the first section of the gate electrode and a second section of the conductive layer is selectively deposited on the second surface of the second section of the gate electrode to shorten the cut. A dielectric material is deposited in the cut between the first and second sections of the conductive layer on the first and second surfaces of the gate electrode to form a dielectric pillar.

BACKGROUND

The present invention relates to semiconductor device fabrication andintegrated circuits and, more specifically, to structures that include afield effect-transistor and methods of forming a structure that includesa field-effect transistor.

Complementary-metal-oxide-semiconductor (CMOS) processes may be used tobuild a combination of p-type and n-type field-effect transistors thatare used to construct, for example, logic cells. Field-effecttransistors generally include a body providing a channel region, asource, a drain, and a gate electrode. When a control voltage exceedinga characteristic threshold voltage is applied to the gate electrode,carrier flow occurs in the channel region between the source and drainto produce a device output current.

A fin-type field-effect transistor (FinFET) is a non-planar devicestructure that may be more densely packed in an integrated circuit thanplanar field-effect transistors. A fin-type field-effect transistor mayinclude a fin consisting of a body of semiconductor material, a gatestructure that wraps about the fin, and heavily-doped source/drainregions spaced along the fin and arranged on opposite sides of the gatestructure.

Gate structures may be initially formed as linear features that extendlongitudinally across fins of fin-type field-effect transistors that areassociated with different active device regions. After forming the gatestructures, a masked etching process may be used to form cuts thatdivide the gate structures into sections that are associated with oneactive device region and sections that are associated with anotheractive device region. The sections of the gate structures associatedwith the different active device regions are disconnected from eachother in the final construction of the fin-type field-effect transistorsin the different active device regions.

As fin pitch scales downward, providing a precision gate cut atlocations between different device regions presents challenges withrespect to process margin. Gate cuts at small dimensions may beincompletely formed, which may result in sections of the gate structuresthat are not fully disconnected. To resolve this issue, the etchingprocess forming the gate cuts may be extended to provide an over-etch.However, the over-etch may unwantedly increase the dimensions of thegate cuts such that, among other effects, the gate contacts may land inpart on the dielectric material filling the gate cuts.

Improved structures that include a field effect-transistor and methodsof forming a structure that includes a field-effect transistor areneeded.

SUMMARY

In an embodiment of the invention, a method includes forming a gatestructure that includes a gate electrode, and forming a cut extendingthrough the gate structure such that the gate electrode is divided intoa first section having a first surface and a second section having asecond surface spaced across the cut from the first surface. The methodfurther includes, after forming the cut, selectively depositing a firstsection of a conductive layer on the first surface of the first sectionof the gate electrode and a second section of the conductive layer onthe second surface of the second section of the gate electrode toshorten the cut. A dielectric material is deposited in the cut betweenthe first section of the conductive layer on the first surface of thegate electrode and the second section of the conductive layer on thesecond surface of the gate electrode to form a dielectric pillar.

In an embodiment of the invention, a structure includes a gate structurehaving a gate electrode with a first section and a second sectiondisconnected from the first section by a cut, and a dielectric caphaving a first section arranged over the first section of the gateelectrode and a second section arranged over the second section of thegate electrode. A dielectric pillar has a first portion arranged in thecut between the first section and the second section of the gateelectrode and a second portion arranged between the first section andthe second section of the dielectric cap. The second portion of thedielectric pillar has a length that is greater than a length of thefirst portion of the dielectric pillar.

In an embodiment of the invention, a structure includes a gate structurehaving a gate electrode with a first section with a first surface and asecond section with a second surface disconnected from the first surfaceby a cut, and a conductive layer having a first section arranged on thefirst surface of the first section of the gate electrode and a secondsection arranged on the second surface of the second section of the gateelectrode. A dielectric pillar is arranged in the cut between the firstsection of the conductive layer and the second section of the conductivelayer.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated in and constitute apart of this specification, illustrate various embodiments of theinvention and, together with a general description of the inventiongiven above and the detailed description of the embodiments given below,serve to explain the embodiments of the invention. In the drawings, likereference numerals are used to indicate like features in the variousviews.

FIG. 1 is a top view of a structure at an initial fabrication stage of aprocessing method in accordance with embodiments of the invention.

FIG. 2 is a cross-sectional view taken generally along line 2-2 in FIG.1.

FIG. 2A is a cross-sectional view taken generally along line 2A-2A inFIG. 1.

FIG. 3 is cross-sectional view of the structure at a fabrication stageof the processing method subsequent to FIG. 2.

FIG. 3A is cross-sectional view of the structure at a fabrication stageof the processing method subsequent to FIG. 2A.

FIG. 4-7 are cross-sectional views of the structure at successivefabrication stages of the processing method subsequent to FIG. 3.

DETAILED DESCRIPTION

With reference to FIGS. 1, 2, and 2A and in accordance with embodimentsof the invention, fins 10, 12 of an integrated circuit structure areformed that project from a substrate 14. The fins 10, 12 may be formedby patterning the single-crystal semiconductor material (e.g.,single-crystal silicon) of the substrate 14 with lithography and etchingprocesses, and cutting the patterning semiconductor material into givenlengths in the layout associated with the specific device structuresbeing formed and their arrangement. Trench isolation regions 16 areformed that operate to electrically isolate the fins 10, 12 from eachother. The trench isolation regions 16 may be formed by depositing alayer composed of a dielectric material, such as an oxide of silicon(e.g., silicon dioxide), by chemical vapor deposition (CVD), andrecessing with an etching process. An upper section of each of the fins10, 12 is revealed by the recessing of the trench isolation regions 16,and a lower section of each of the fins 10, 12 is surrounded by thetrench isolation regions 16.

Gate structures 18 of the integrated circuit structure are formed thatextend along respective longitudinal axes over the fins 10, 12 andtrench isolation regions 16. Each gate structure 18 is arrangedtransverse to the fins 10 and overlaps with a section of each fin 10.Each gate structure 18 is also arranged transverse to the fins 12 andoverlaps with a section of each fin 12. Each gate structure 18 mayinclude a gate electrode 20 and a gate dielectric layer 22 arrangedbetween the overlapped sections of the fins 10, 12 and the gateelectrode 20. The gate electrode 20 may include one or more conformalbarrier metal layers and/or work function metal layers, such as metallayers composed of titanium aluminum carbide and/or titanium nitride,and/or a metal gate fill layer composed of a conductor, such astungsten, cobalt, or aluminum. The gate dielectric layer 22 may becomposed of a high-k dielectric material, such as hafnium oxide. Eachgate electrode 20 has a width, W, in a direction transverse to itslongitudinal axis (i.e., its length). The intended location for a cut48, which is formed by subsequent fabrication stages, in the gateelectrode 20 of one of the gate structures 18 is diagrammatically shownin FIG. 1.

Sidewall spacers 26 are arranged on the opposite sidewalls of the gatestructures 18. The sidewall spacers 26 may be composed of a low-kdielectric material that is deposited with atomic layer deposition (ALD)as a conformal layer on the gate structures 18 and etched with adirectional etching process, such as reactive ion etching (RIE).

Semiconductor layers 28 are epitaxially grown from the fins 10, 12. Thesemiconductor layers 28 may be formed by an epitaxial growth process inwhich semiconductor material epitaxially grows from a semiconductorsurface, such as the exposed surfaces of fins 10, 12. The epitaxialsemiconductor layers 28 associated with fins 10 may containsilicon-germanium doped during epitaxial growth with a p-type dopant(e.g., boron, aluminum, gallium, and/or indium) that provides p-typeelectrical conductivity, and the epitaxial semiconductor layers 28associated with fins 12 may contain silicon doped during epitaxialgrowth with an n-type dopant (e.g., phosphorus and/or arsenic) thatprovides n-type electrical conductivity. The epitaxial semiconductorlayers 28 furnish source/drain regions for field-effect transistorsformed using the fins 10, 12 and gate structures 18, and provideenlarged landing areas for contacts. As used herein, the term“source/drain region” means a doped region of semiconductor materialthat can function as either a source or a drain of a field-effecttransistor.

A conformal contact etch stop layer (CESL) 32 and an interlayerdielectric layer 34 are formed in the spaces over the epitaxialsemiconductor layers 28. The CESL 32 provides a liner arranged over theepitaxial semiconductor layers 28 and between the sidewall spacers 26and the sections of interlayer dielectric layer 34. The CESL 32 may becomposed of a thin layer of a dielectric material, such as siliconnitride, deposited by atomic layer deposition. The interlayer dielectriclayer 34 may be composed of a dielectric material, such as silicondioxide, that is deposited by chemical vapor deposition and planarized,and that differs in composition from the dielectric material of thesidewall spacers 26.

With reference to FIGS. 3, 3A in which like reference numerals refer tolike features in FIGS. 2, 2A and at a subsequent fabrication stage ofthe processing method, the gate electrode 20 and the gate dielectriclayer 22 of the gate structures 18 are recessed relative to the sidewallspacers 26, the CESL 32, and the interlayer dielectric layer 34 usingone or more selective etching processes to form cavities. As usedherein, the term “selective” in reference to a material removal process(e.g., etching) denotes that, with an appropriate etchant choice, thematerial removal rate (i.e., etch rate) for the targeted material isgreater than the removal rate for at least another material exposed tothe material removal process. Portions of the sidewall spacers 26project above the top surface of the recessed gate structures 18, andthe cavities are arranged over the recess gate structures 18 between thesidewall spacers 26.

After the gate structures 18 are recessed, self-aligned contact caps 38are formed as dielectric caps in the cavities over the gate structures18 and between the portions of the sidewall spacers 26 arranged over thegate structures 18. The self-aligned contact caps 38 may be composed ofa layer of a dielectric material, such as silicon nitride, that isdeposited by chemical vapor deposition and then planarized withchemical-mechanical polishing (CMP).

With reference to FIG. 4 in which like reference numerals refer to likefeatures in FIG. 3 and at a subsequent fabrication stage of theprocessing method, a hardmask 40 is formed over the self-aligned contactcap 38 by depositing a layer of material and patterning the material ofthe deposited layer with lithography and etching processes to generatean opening 42. The hardmask 40 may be composed of a material, such astitanium oxide, that can be removed by an etching process selective tothe material of the self-aligned contact caps 38. The opening 42 in thehardmask 40 exposes a portion of the self-aligned contact cap 38 overone of the gate structures 18. The exposed portion of the self-alignedcontact cap 38 may be located in an area that is arranged in a lateraldirection between the fins 10 and the fins 12.

The opening 42 in the hardmask 40 extends parallel to the longitudinalaxis of the gate structure 18 and has a length, L1, that issignificantly less than the length of the gate structure 18. The opening42 opening 42 may overlap at its side edges with the sidewall spacers 26and adjacent sections of the interlayer dielectric layer 34.

The opening 42 is transferred from the hardmask 40 to the self-alignedcontact cap 38. Specifically, the portion of the self-aligned contactcap 38 exposed by the opening 42 in the hardmask 40 is etched andremoved with an etching process, such as a reactive ion etching process,to extend the opening 42 into the self-aligned contact cap 38. Theopening 42 in the self-aligned contact cap 38 exposes a lengthwiseportion of the gate structure 18 having an area that is equal orsubstantially equal to the cross-sectional area of the opening 42. Theopening 42 divides the self-aligned contact cap 38 into disconnectedsections that face each other across the opening 42 and that areseparated by the length, L1.

With reference to FIG. 5 in which like reference numerals refer to likefeatures in FIG. 4 and at a subsequent fabrication stage of theprocessing method, the hardmask 40 is removed from the self-alignedcontact cap 38 by an etching process that stops on the self-alignedcontact cap 38. The etching process removes the hardmask 40 selective tothe self-aligned contact cap 38. The exposed portions of the gateelectrode 20 and the gate dielectric layer 22 are then removed by one ormore etching processes, such as one or more reactive ion etchingprocesses, to define a cut 48 in the gate structure 18. The one or moreetching processes may stop on the trench isolation region 16. The cut 48may penetrate fully through the thickness or height of the gatestructure 18 to the top surface of the trench isolation region 16 andfully across the width of the gate electrode 20 such that the gateelectrode 20 is divided into individual disconnected sections that arearranged along a common longitudinal axis.

The cut 48 introduces a discontinuity in the gate structure 18 thatprovides the disconnected sections of the associated gate electrode 20.Each section of the gate electrode 20 includes a surface 50 that bordersthe opposite sidewalls of the cut 48. One of the sections of the gateelectrode 20 may be associated with the fins 10, and the other of thesections of the gate electrode 20 may be associated with the fins 12.The cut 48 initially has a length equal or substantially equal to thelength, L1, of the opening 42 in the hardmask 40 and a width in adirection that is transverse to the length. The width of the cut 48optionally includes the thickness of the gate dielectric layer 22.

With reference to FIG. 6 in which like reference numerals refer to likefeatures in FIG. 5 and at a subsequent fabrication stage of theprocessing method, a conductive layer 52 is formed on the surfaces 50 ofthe disconnected sections of the gate electrode 20 bordering theopposite sides of the cut 48. The conductive layer 52 may be composed ofa conductor, such as a metal like tungsten, cobalt, aluminum, or copper,and each conductive layer 52 may have a given thickness, t, measurednormal to the surface 50 on which it is formed. The conductive layer 52is selectively deposited on each surface 50 by a deposition processes,such as chemical vapor deposition or electroplating, that forms themetal on the surfaces 50 without forming the metal on exposed dielectricsurfaces, such as the exposed surfaces of the self-aligned contact cap38 bordering the cut 48 and the exposed surface of the trench isolationregion 16 at the base of the cut 48. The conductive layer 52 shortensthe length of the cut 48 such that the cut 48 has a length, L2, that isless than the initial length, L1 (FIG. 5). The width of the cut 48 isunchanged by the addition of the conductive layer 52 on each of thesurfaces 50. In an embodiment, the sections of the conductive layer 52may deposit with equal or substantially equal thickness on therespective surfaces 50 and thereby shorten the length of the cut 48 byan amount equal to two times the thickness, t, of the conductive layer52.

With reference to FIG. 7 in which like reference numerals refer to likefeatures in FIG. 6 and at a subsequent fabrication stage of theprocessing method, a dielectric pillar 54 is formed in the shortened cut48 between the sections of the conductive layer 52 on the surfaces 50 ofthe sections of the gate electrode 20 and in the opening 42 between thesections of the self-aligned contact cap 38, and planarized withchemical-mechanical polishing (CMP). In an embodiment, the dielectricpillar 54 may be composed of a dielectric material, such as siliconnitride, deposited by chemical vapor deposition or atomic layerdeposition. In an embodiment, the dielectric material of the dielectricpillar 54 may have a different composition than the dielectric materialof the self-aligned contact cap 38. In an embodiment, the dielectricpillar 54 may be composed of a dielectric material characterized by adielectric constant that is less than the dielectric constant of siliconnitride (i.e., a low-k dielectric material), such as SiC, SiOC, SiOCN,or SiBCN, deposited by chemical vapor deposition or atomic layerdeposition.

A lower portion of the dielectric pillar 54 is arranged in the cut 48and has a length equal or substantially equal to the length, L2, of thecut 48, which is shortened by the addition of the sections of theconductive layer 52 on each surface 50 of the different sections of thegate electrode 20. An upper portion of the dielectric pillar 54 isarranged in the opening 42 in the self-aligned contact cap 38 and has alength equal or substantially equal to the length, L1, of the opening42. The result is that the dielectric pillar 54 has dual lengths withthe shorter lower portion arranged inside the gate electrode 20 and thelonger upper portion arranged inside the self-aligned contact cap 38.The lower portion of the dielectric pillar 54 electrically andphysically isolates the different sections of the gate electrode 20 ofthe gate structure 18 from each other.

The dielectric pillar 54 is formed in a self-aligned manner in the cut48 between the sections of the gate electrode 20 and in the opening 42in the self-aligned contact cap 38. The selective deposition of theconductive layer 52 on the surfaces 50 of the gate electrode 20 permitsthe cut 48 to be readily shortened to provide cut scaling in ametal-gate-cut-last process flow. The cut 48 may be provided with smalldimensions and completely formed without the need for an over-etch.

After forming and filling the cut 48 with dielectric material,middle-of-line processing may be performed to form contacts connectedwith the gate electrodes 20 of the gate structures 18 and the epitaxialsemiconductor layers 28 providing the source/drain regions.

The methods as described above are used in the fabrication of integratedcircuit chips. The resulting integrated circuit chips can be distributedby the fabricator in raw wafer form (e.g., as a single wafer that hasmultiple unpackaged chips), as a bare die, or in a packaged form. Thechip may be integrated with other chips, discrete circuit elements,and/or other signal processing devices as part of either an intermediateproduct or an end product. The end product can be any product thatincludes integrated circuit chips, such as computer products having acentral processor or smartphones.

References herein to terms modified by language of approximation, suchas “about”, “approximately”, and “substantially”, are not to be limitedto the precise value specified. The language of approximation maycorrespond to the precision of an instrument used to measure the valueand, unless otherwise dependent on the precision of the instrument, mayindicate +/−10% of the stated value(s).

References herein to terms such as “vertical”, “horizontal”, etc. aremade by way of example, and not by way of limitation, to establish aframe of reference. The term “horizontal” as used herein is defined as aplane parallel to a conventional plane of a semiconductor substrate,regardless of its actual three-dimensional spatial orientation. Theterms “vertical” and “normal” refer to a direction perpendicular to thehorizontal, as just defined. The term “lateral” refers to a directionwithin the horizontal plane.

A feature “connected” or “coupled” to or with another feature may bedirectly connected or coupled to or with the other feature or, instead,one or more intervening features may be present. A feature may be“directly connected” or “directly coupled” to or with another feature ifintervening features are absent. A feature may be “indirectly connected”or “indirectly coupled” to or with another feature if at least oneintervening feature is present. A feature “on” or “contacting” anotherfeature may be directly on or in direct contact with the other featureor, instead, one or more intervening features may be present. A featuremay be “directly on” or in “direct contact” with another feature ifintervening features are absent. A feature may be “indirectly on” or in“indirect contact” with another feature if at least one interveningfeature is present.

The descriptions of the various embodiments of the present inventionhave been presented for purposes of illustration, but are not intendedto be exhaustive or limited to the embodiments disclosed. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the describedembodiments. The terminology used herein was chosen to best explain theprinciples of the embodiments, the practical application or technicalimprovement over technologies found in the marketplace, or to enableothers of ordinary skill in the art to understand the embodimentsdisclosed herein.

What is claimed is:
 1. A method comprising: forming a gate structureincluding a gate electrode; forming a cut extending through the gatestructure such that the gate electrode is divided into a first sectionhaving a first surface and a second section having a second surfacespaced across the cut from the first surface; after forming the cut,selectively depositing a first section of a conductive layer on thefirst surface of the first section of the gate electrode and a secondsection of the conductive layer on the second surface of the secondsection of the gate electrode to shorten the cut; and depositing a firstdielectric material in the cut between the first section of theconductive layer on the first surface of the gate electrode and thesecond section of the conductive layer on the second surface of the gateelectrode to form a dielectric pillar.
 2. The method of claim 1 furthercomprising: before forming the cut, forming a dielectric cap over thegate structure; and patterning the dielectric cap to form an openingextending through the dielectric cap to the gate electrode of the gatestructure.
 3. The method of claim 2 wherein the cut is formed beneaththe opening in the dielectric cap by an etching process.
 4. The methodof claim 3 wherein the opening has a first length, and the cut has asecond length that is substantially equal to the first length beforeselectively depositing the first section of the conductive layer on thefirst surface of the first section of the gate electrode and the secondsection of the conductive layer on the second surface of the secondsection of the gate electrode.
 5. The method of claim 3 wherein theopening has a first length, and the cut has a second length that is lessthan the first length after selectively depositing the first section ofthe conductive layer on the first surface of the first section of thegate electrode and the second section of the conductive layer on thesecond surface of the second section of the gate electrode.
 6. Themethod of claim 2 wherein the dielectric cap includes a first sectionarranged over the first section of the gate electrode and a secondsection arranged over the second section of the gate electrode, and thefirst section of the dielectric cap and the second section of thedielectric cap are disconnected by the opening.
 7. The method of claim 6wherein the conductive layer is selectively deposited on the firstsurface of the first section of the gate electrode and on the secondsurface of the second section of the gate electrode without depositingwithin the opening on the first section and the second section of thedielectric cap.
 8. The method of claim 2 wherein the first dielectricmaterial is a low-k dielectric material, and the dielectric cap iscomprised of a second dielectric material having a different compositionthan the first dielectric material.
 9. The method of claim 1 wherein theconductive layer has a first thickness on the first surface of the firstsection of the gate electrode and a second thickness on the secondsurface of the second section of the gate electrode, and the firstthickness is substantially equal to the second thickness.
 10. The methodof claim 1 wherein the conductive layer is comprised of a first metal,and the gate electrode is comprised of a second metal having a differentcomposition than the first metal.
 11. The method of claim 1 wherein thefirst section of the gate electrode is disconnected from the secondsection of the gate electrode.
 12. A structure comprising: a gatestructure including a gate electrode with a first section and a secondsection disconnected from the first section by a cut; a dielectric capincluding a first section arranged over the first section of the gateelectrode and a second section arranged over the second section of thegate electrode; and a dielectric pillar having a first portion arrangedin the cut between the first section and the second section of the gateelectrode and a second portion arranged between the first section andthe second section of the dielectric cap, the first portion of thedielectric pillar having a first length, and the second portion of thedielectric pillar having a second length that is greater than the firstlength.
 13. The structure of claim 12 wherein the dielectric pillar iscomprised of first dielectric material, and the dielectric cap iscomprised of a second dielectric material having a different compositionthan the first dielectric material.
 14. The structure of claim 13wherein the first dielectric material is a low-k dielectric material.15. The structure of claim 12 wherein the first section of the gateelectrode has a first surface and the second section of the gateelectrode has a second surface, further comprising: a conductive layerhaving a first section arranged on the first surface and a secondsection arranged on the second surface.
 16. The structure of claim 15wherein the conductive layer has a first thickness on the first surfaceof the gate electrode and a second thickness on the second surface ofthe gate electrode, and the first thickness is substantially equal tothe second thickness.
 17. The structure of claim 15 wherein theconductive layer is comprised of a first metal, and the gate electrodeis comprised of a second metal having a different composition than thefirst metal.
 18. A structure comprising: a gate structure including agate electrode with a first section with a first surface and a secondsection with a second surface disconnected from the first surface by acut; a conductive layer having a first section arranged on the firstsurface of the first section of the gate electrode and a second sectionarranged on the second surface of the second section of the gateelectrode; and a dielectric pillar arranged in the cut between the firstsection of the conductive layer and the second section of the conductivelayer.
 19. The structure of claim 18 wherein the first section of theconductive layer has a first thickness on the first surface of the gateelectrode, the second section of the conductive layer has a secondthickness on the second surface of the gate electrode, and the firstthickness is substantially equal to the second thickness.
 20. Thestructure of claim 18 wherein the conductive layer is comprised of afirst metal, and the gate electrode is comprised of a second metalhaving a different composition than the first metal.